761 203 7422, Web: http://www.imtek.de/ nano/ ZnO nanowires and related materials are in the focus of attention for electronic, optical or sensor applications. However, size, position and arrangement control are essential conditions for the development of future nanowire based devices. Various kinds of template methods including nanosphere lithography and UV laser interference lithography are powerful tools for the preparation of the starting metal catalyst arrays and will be demonstrated and discussed. However, only if the growth mechanism and its guiding parameters are understood in detail, the template will force a pattern arranged growth of nanowires. The paper gives an overview of the various kinds of growth modes for vertical arranged nanowires. Specific experimental conditions establishing the VS or the VLS growth are discussed. In addition, insight is given why the patterning is not all the time conserved and how to overcome these obstacles. In the second part different kinds of applications are summarized. Electronic properties are discussed based on metal-semiconductor-metal devices. The influence of a core-shell nanowire structure on the optical properties is demonstrated. In addition, a simple approach for ZnO nanowire based gas sensors is discussed and shown. As a last example, the transfer of Al 2 O 3 coated nanowires into spinel tubes is reported.