Nano‐ and Micromanufacturing with Nanoparticles Produced in the Gas Phase: An Emerging Tool for Functional and Length‐Scale Integration

Gas phase fabrication of morphology-controlled ITO nanoparticles and their assembled conductive films

“…It provides a well-developed and finely controlled process able to produce nanoparticle based films with a high level of control on the particle size, density and morphology. 35,36 In this technology, nanoparticles are preformed in a gas phase cluster source and then deposited on a substrate under high vacuum. This allows one to gain a flexible control over the nanoparticle size and morphology by tuning the operation parameters of the cluster source, as well as a wide selection over the deposition conditions such as temperature and the surface pattern of the substrates.…”