IEEE Trans. Instrum. Meas.
 2024
DOI: 10.1109/tim.2023.3343805
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Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm

Peng Xu,
Rui-Jun Li,
Yi Shen
et al.
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