2021
DOI: 10.47176/sjfst.3.4.1
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Nano-Structural Characteristics and Optical and Electrical Properties of Obliquely Deposited Manganese Oxide Thin Films

Abstract: In this work, manganese oxide thin films as a graded helical square tower-like (terraced) sculptured thin films with 8, 9, and 10 arms were deposited on a glass substrate by oblique angle deposition (OAD) method. Structural and morphological characteristics of the produced samples were obtained through xray diffraction (XRD), atomic force microscopy (AFM), and field emission electron microscopy (FESEM) analyses. The optical and electrical properties of manganese oxide thin film were studied by Photoluminescenc… Show more

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“…The compound manganese oxide has garnered significant attention from researchers, leading to several research endeavours [9,10]. Manganese oxide and manganese oxide nanoparticles have been synthesized via a variety of techniques, including spray pyrolysis [11], sol-gel [12], atomic layer deposition [13], thermal evaporation [14][15][16], pulsed laser deposition [17][18][19], RF magnetron sputtering [20,21], metal-organic chemical vapor deposition [22], and electron beam technique followed by archiving post-treatment [23]. Nelson et al [24] studied the impact of deposition temperature and substrate on the formation of manganese oxide thin films using ALD (Atomic Layer Deposition).…”
Section: Introductionmentioning
confidence: 99%
“…The compound manganese oxide has garnered significant attention from researchers, leading to several research endeavours [9,10]. Manganese oxide and manganese oxide nanoparticles have been synthesized via a variety of techniques, including spray pyrolysis [11], sol-gel [12], atomic layer deposition [13], thermal evaporation [14][15][16], pulsed laser deposition [17][18][19], RF magnetron sputtering [20,21], metal-organic chemical vapor deposition [22], and electron beam technique followed by archiving post-treatment [23]. Nelson et al [24] studied the impact of deposition temperature and substrate on the formation of manganese oxide thin films using ALD (Atomic Layer Deposition).…”
Section: Introductionmentioning
confidence: 99%