Nano-structured multi-layer SiGe alloy grown by ultra high vacuum chemical vapor deposition

Ye, Zhizhen; Wu, Guibin; Huang, Jingyun; Cui, Jifeng; Sun, Wenjie; Liu, Guojun; Zhao, Binghui

doi:10.1109/icsict.2004.1435265

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.

DOI: 10.1109/icsict.2004.1435265

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Nano-structured multi-layer SiGe alloy grown by ultra high vacuum chemical vapor deposition

Zhizhen Ye

Guibin Wu

Jingyun Huang

et al.

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Nano-structured multi-layer SiGe alloy grown by ultra high vacuum chemical vapor deposition

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References 4 publications

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