2005
DOI: 10.1143/jjap.44.8186
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Nanoimprint and Lift-Off Process Using Poly(vinyl alcohol)

Abstract: We developed a lift-off process for a nanoimprint lithography (NIL) using poly(vinyl alcohol) (PVA) as the replicated material. PVA could easily be dissolved in water. A conventional lift-off process using poly(metyl methacrylate) (PMMA) uses acetone as a solvent, while the lift-off process using PVA uses water as a solvent, which is an ecologically friendly process. We demonstrated Au patterns with sub-µm dimensions using a lift-off process with a PVA single layer. In addition, an Hydrogen silsesquioxane (HSQ… Show more

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Cited by 27 publications
(13 citation statements)
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“…PVA is frequently used only as a lift-off layer since nanoimprinting this material requires the use of hard molds under high pressures (5 MPa), which hinder conformal contact with the substrate. 13 In contrast, we demonstrate herein the imprinting of HPC with extremely low pressures ( ca. 0.05 MPa) and flexible PDMS molds.…”
Section: Introductionmentioning
confidence: 59%
“…PVA is frequently used only as a lift-off layer since nanoimprinting this material requires the use of hard molds under high pressures (5 MPa), which hinder conformal contact with the substrate. 13 In contrast, we demonstrate herein the imprinting of HPC with extremely low pressures ( ca. 0.05 MPa) and flexible PDMS molds.…”
Section: Introductionmentioning
confidence: 59%
“…The composition of the imprint resin is 94 wt % of M-PDMS ͑Gelest͒ as a base resin, 3 wt % of UV initiator ͑IGAcure184™, Ciba-Geigy͒, and 3 wt % of methacryl-oxypropyl-trichlorosilane ͑Gelest͒, 14 which can bond to hydroxyl groups on the PVA underlayer to improve adhesion between the resin and substrate. 16 Figure 3 shows scanning electron microscopy ͑SEM͒ images of patterns of the quartz master template used in this experiment ͓Figs. The quartz master template used in this experiment was fabricated by conventional deep-UV photolithography and RIE with CHF 3 gasbased plasma.…”
Section: Methodsmentioning
confidence: 99%
“…Since PVA is water soluble resin, this film can be easily removed in water without film damage for various resins. By use of this unique property, PVA is often used as the sacrificial film [17][18][19][20]. For PVA/PET sheet, the PVA film has enough thickness, and the film can work as supporting film for the thin patterned resin.…”
Section: Transfer Process By Use Of Water Soluble Resinmentioning
confidence: 99%