Nanolink-based thermal devices : integration of ALD tin thin films

Abstract

Publisher: Gildeprint Drukkerijen, Enschede MS Word thesis template by Ihor BrunetsThe cover shows an optical micrograph (topview) of Greek Cross shaped four-point structures with buried electrodes (chapter 2) for the electrical characterization of ultrathin ALD TiN layers ('Dead Cow van der Pauws') during the fabrication process after wet chemical etching of the ALD TiN layer stack, showing redeposited photoresist residues of square-shaped contact chain structures (which are located outside the image).

Low-power silicon-based thermal sensors and actuators for chemical applications

“…From our point of view and based on the outcome of the research conducted within SC Group [148], [149] as well as our experience with devices fabricated (run 2, w175, w181) these research directions shall be prioritized before carrying on with the gas sensitivity measurements on these devices:…”

“…For more details refer to work of A. Groenland [148], [149]. Three types of the hot surface devices were developed with typical dimensions and corresponding range of resistances listed in Table 6.1:…”