2004
DOI: 10.1002/ange.200300609
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Nanolithographie und Nanochemie: Sondentechniken zur Strukturierung und chemischen Modifizierung von Nanobauelementen

Abstract: Da photolithographisch nicht beliebig kleine Bauelemente hergestellt werden können, werden andere Strukturierungstechniken intensiv untersucht. Insbesondere Rastersondenlithographie‐Techniken gelten als vielversprechend für die Erzeugung solcher Strukturen, und da ihre Anwendung relativ einfach ist, sind diese Methoden inzwischen weit verbreitet. Beispiele sind die Dip‐Pen‐Lithographie und die kraftinduzierte lokale Strukturierung ebenso wie die lokale Oxidation mit Sonden. Diese Techniken sind besonders inter… Show more

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Cited by 23 publications
(8 citation statements)
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References 128 publications
(127 reference statements)
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“…[217] Area-selective modification of a prospective substrate is done by tip-induced chemical reactions of the surface. [218] Organosilicon monolayers on silicon wafers can be locally degraded through electrochemical decomposition of the adsorbed water at the junction of the monolayer and the SPM probe. The SPM probe scanned region if reacted with another organosilane results in high-contrast patterns of selectively adsorbed NPs.…”
Section: In Two Dimensionsmentioning
confidence: 99%
“…[217] Area-selective modification of a prospective substrate is done by tip-induced chemical reactions of the surface. [218] Organosilicon monolayers on silicon wafers can be locally degraded through electrochemical decomposition of the adsorbed water at the junction of the monolayer and the SPM probe. The SPM probe scanned region if reacted with another organosilane results in high-contrast patterns of selectively adsorbed NPs.…”
Section: In Two Dimensionsmentioning
confidence: 99%
“…[2][3][4][5][6][7] 1D molecular metal wires, [8,9] and 1D and 2D superclusters [10,11] are interesting in themselves as low-dimensional molecular materials with possible applications in molecular electronics and nanolithography. [12][13][14] The recent improvement of the synthesis of "platinum carbonyl" [7] prompted a reinvestigation of the chemistry of the [Pt 3n (CO) (CO) 48 ] reveals a distribution of oligomers centered at n = 5, with peaks of lesser intensity at n = 4 and n = 6. The observed distribution is narrower than the bellshaped distribution of n = 3-10 oligomers, centered at n = 6 or 7, exhibited by "platinum carbonyl".…”
mentioning
confidence: 99%
“…[4][5][6][7][8] In contrast to ultrahigh-vacuum (UHV) conditions where the reservoir of manipulable molecules is restricted to the number of adsorbed species, the supernatant liquid phase at the solid-liquid interface in principle offers an almost unlimited depot of molecules ("ink") and is therefore the perfect experimental environment for tip-controlled adsorption of guest molecules into the HBN. The "ink" attribute of a supernatant solution is used in scanning-probe-based lithographic techniques such as replacement lithography [9] and dip-pen lithography [10] to tailor the chemical composition and structure of a surface on the 100 nm scale. So far, these lithographic techniques are limited to a resolution of about 15 nm.…”
mentioning
confidence: 99%