2023
DOI: 10.55452/1998-6688-2023-20-2-6-12
|View full text |Cite
|
Sign up to set email alerts
|

Nanoparticle Synthesis by the Pecvd Method Based on Rf Discharge

B. Zharylgapov,
S. A. Orazbayev

Abstract: This scientific paper presents the results of the study of the synthesis of carbon nanoparticles in radio-frequency ( RF ) discharge plasma at low pressures in a vacuum apparatus. The growth of carbon nanoparticles was studied under different plasma parameters, such as variation of self-displacement voltage, temperature, and discharge power. The experiment was performed in the pressure range of 0.5-1.1 mbarr and powers of 6-20 W. The results showed that the synthesis time of carbon nanoparticles, including the… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 15 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?