2011
DOI: 10.3844/ajnsp.2011.127.131
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Nanoscale Pitch Standards Sample Fabricated using Laser-Focused Atomic Deposition

Abstract: Problem statement: Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate. The determination of absolute measurements of length at the nanometer scale and below is very difficult and expensive. So the nanoscale metrology standard is needed. Approach: The laser-focused atomic deposition is a new way to establish nanoscale pitch standards. When the atoms pass though laser standing wave field, the atoms will change the moving trajectory a… Show more

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