Nanosecond pulse laser scribing using Bessel beam for single shot removal of transparent conductive oxide thin film

Kim, Byunggi; Iida, Ryoya; Doan, Duc Hong; Fushinobu, Kazuyoshi

doi:10.1016/j.ijheatmasstransfer.2016.11.088

Cited by 13 publications

(3 citation statements)

References 20 publications

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“…In the absence of convective and radiative heat exchanges, the thermal response of the solid material is governed by the following energy balance equation [1,20,21] ,…”

Section: Temperature-dependent Absorption Coefficientmentioning

confidence: 99%

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Uncertainty quantification for modeling pulsed laser ablation of aluminum considering uncertainty in the temperature-dependent absorption coefficient

Wang

Befekadu

Ding

et al. 2018

International Journal of Heat and Mass Transfer

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In this paper, an extension of the result of Wang et al. ("Modeling pulsed laser ablation of aluminum with finite element analysis considering material moving front," Int. J. Heat & Mass Transfer, 113, 1246-1253, 2017) concerning the problem of uncertainty quantification for pulsed laser ablation (PLA) of aluminum is considered, when the source of uncertainty is due to an inherent randomness of the temperature-dependent absorption coefficient. In particular, we use a generalized polynomial chaos (gPC) method to incorporate the parameter uncertainty for the temperature-dependent absorption coefficient within the representation of the laser heat conduction phenomena. Furthermore, numerical simulation studies for the PLA of aluminum, with nanosecond Nd:YAG 266 nm pulsed laser, that demonstrate the proposed gPC predictions

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“…In the absence of convective and radiative heat exchanges, the thermal response of the solid material is governed by the following energy balance equation [1,20,21] ,…”

Section: Temperature-dependent Absorption Coefficientmentioning

confidence: 99%

“…Meanwhile, the reflectivity is assumed to be deterministic, while the absorption coefficient is uncertain. The absorption coefficient values reported by Refs [20,21,23,24,26,29,30]. are collected, and are allowed to vary over a range that covers all conceivable values, i.e., (see Eq.…”

mentioning

confidence: 99%

Uncertainty quantification for modeling pulsed laser ablation of aluminum considering uncertainty in the temperature-dependent absorption coefficient

Wang

Befekadu

Ding

et al. 2018

International Journal of Heat and Mass Transfer

View full text Add to dashboard Cite

show abstract

“…Similarly, Computational Fluid Dynamics (CFD) and Finite Element Method (FEM) models were developed to predict ablation depth and diameter of nanosecond single laser beam configurations, such as DLW. Complexity of these proposed models varied including effects like solidification, evaporation, gas dynamics, and laser induced thermal effects [15][16][17], plasma shielding [18][19][20][21] or layered multi-material structues [22].…”

Section: Introductionmentioning

confidence: 99%

Numerical simulation of periodic surface structures created by direct laser interference patterning

et al. 2023

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Surface structuring using nano-second lasers can be used to enhance certain properties of a material or even to introduce new ones. One way to create these structures efficiently is direct laser interference patterning using different polarization vector orientations of the interfering beams. However, experimentally measuring the fabrication process of these structures is very challenging due to small length and time scales. Therefore, a numerical model is developed and presented for resolving the physical effects during formation the predicting the resolidified surface structures. This three-dimensional, compressible computational fluid dynamics model considers the gas, liquid, and solid material phase and includes various physical effects, such as heating due to the laser beam for both parallel and radial polarization vector orientations, melting, solidification, and evaporation, Marangoni convection, and volumetric expansion. The numerical results reveal a very good qualitatively and quantitatively agreement with experimental reference data. Resolidified surface structures match both in overall shape as well as crater diameter and height, respectively. Furthermore, this model gives valuable insight on different quantities during the formation of these surface structures, such as velocity and temperature. In future, this model can be used to predict surface structures based on various process input parameters.

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Mechanism of nanosecond laser drilling process of 4H-SiC for through substrate vias

et al. 2017

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Nanosecond pulse laser scribing using Bessel beam for single shot removal of transparent conductive oxide thin film

Cited by 13 publications

References 20 publications

Uncertainty quantification for modeling pulsed laser ablation of aluminum considering uncertainty in the temperature-dependent absorption coefficient

Uncertainty quantification for modeling pulsed laser ablation of aluminum considering uncertainty in the temperature-dependent absorption coefficient

Numerical simulation of periodic surface structures created by direct laser interference patterning

Mechanism of nanosecond laser drilling process of 4H-SiC for through substrate vias

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