Nanostructured Thin Optical Sensors for Trace Gas Detection

Abstract

-We report on new features of nanostructured coatings used in trace gas detection applications based on the modification of optical parameters. We review the general physical principles underlying the operation of optical detectors and introduce the basic systems used in trace gas recognition. Pd-doped SnO 2 thin films were pulsed laser deposited on Si (100) and quartz substrates in 10 Pa O 2 at different substrate temperatures. Coatings on Si were investigated by scanning electron microscopy and atomic force microscopy to determine their surface morphology and by grazing incidence X-ray diffraction for films structure. Twin films deposited on quartz were investigated using the m-line technique to monitor the variation of optical properties when exposed to butane diluted in N 2 down to 100 ppm concentration. The acquired expertise was used to design a miniaturized system which was tried in real conditions.

Characterization of PLD grown WO 3 thin films for gas sensing

“…iii) The films obtained by PLD after the plasma transfer are usually very adherent to substrate and also have a rather large hardness, which is of key importance for the long term use as gas sensors in specialized devices [17,[22][23].…”