Nanosystems Utilizing Three-Dimensional Integration and Gas Dielectrics for Enhanced System Performance

Abstract

Nanoelectronic systems utilizing three-dimensional (3D) integration is an emerging technology that vertically stacks and interconnects multiple materials, technologies, and functional components to form highly integrated micro/nanosystems. This article introduces the concept of utilizing gas dielectrics in 3D integrated systems having a dielectric constant close to unity in order to considerably enhance system performance.