2007
DOI: 10.1016/j.surfcoat.2007.05.063
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Near cathode optical emission spectroscopy in N2–H2 glow discharge plasma

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Cited by 38 publications
(17 citation statements)
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“…Sufficiently energized electrons collide with N 2(g) and H 2(g) to dissociate them into gas phase atomic N and H species, respectively (Reactions A−B). Given the relative N≡N and H−H bond energies, and our 1 : 4N 2 : H 2 ratio for the reactor feed, we expect atomic H to be much more abundant than atomic N. Other collisions may lead to ionic and excited molecular species, which have been reported in literature for both radiofrequency and glow discharge trueN2()g+4pte-4pt4pt2Ng+e- trueH2()g+4pte-4pt4pt2Hg+4pte- …”
Section: Resultsmentioning
confidence: 55%
“…Sufficiently energized electrons collide with N 2(g) and H 2(g) to dissociate them into gas phase atomic N and H species, respectively (Reactions A−B). Given the relative N≡N and H−H bond energies, and our 1 : 4N 2 : H 2 ratio for the reactor feed, we expect atomic H to be much more abundant than atomic N. Other collisions may lead to ionic and excited molecular species, which have been reported in literature for both radiofrequency and glow discharge trueN2()g+4pte-4pt4pt2Ng+e- trueH2()g+4pte-4pt4pt2Hg+4pte- …”
Section: Resultsmentioning
confidence: 55%
“…Thus, the differences in the observed spectra at different locations are only due to different governing mechanisms occurring at different regions. 35 When the MOP is positioned very near to the cathode, i.e., inside the cathode fall, it collects emissions coming from the vicinity of the cathode and excludes the emissions from negative glow and positive column. For our discharge parameters, the approximate sheath thickness is ϳ10 mm.…”
Section: A Experimental Setupmentioning
confidence: 99%
“…Barbeu and Jolly 3 used these experimentally observed ion distributions obtained by Dexter et al for calculating the number of excited neutrals in n = 3 state ͓N H ͑n =3͔͒. Our approach here is to use a recently proposed and experimentally verified model by Suraj et al 26,35,36 for the nitrogen discharges and extend the same to the hydrogen discharge for estimating the mean energies, mean velocities, and ion concentrations for our dis-charge conditions. In what follows, a brief description of the model is given and all the calculations are presented.…”
Section: A Velocity Distribution Of H + H 2 + and H 3 +mentioning
confidence: 99%
“…This fact was confirmed by different research groups dealing with plasma diagnostics. 15 An increase in the bias power leads to a decreasing shift of the I-V curve. The application of bias power or change of the process temperature at a fixed H 2 /N 2 gas ratio leads immediately to a self-adjustment of the AS power (see Figs.…”
Section: Resultsmentioning
confidence: 99%