New-Generation Optical Stepper With High N.A. g-Line Lens

Matsumoto, Koichí; Ushida, Kazuo; Kawai, Hidemi; Nei, Masahiro; Murakami, Seiro; Nakamura, Shigenari; Kameyama, Masaomi

doi:10.1117/12.953144

Cited by 1 publication

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“…If the exposure is made at the normal incidence of monochromatic light, the light intensity I(z) at vertical position z is given by [1] posure dose loss and the fiducial pattern signal can be detected without any intensity loss.…”

Section: Simulated Results and Discussionmentioning

confidence: 99%

A New Photolithography Technique with Antireflective Coating on Resist: ARCOR

Tanaka

Hasegawa

Shiraishi

et al. 1990

J. Electrochem. Soc.

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The multiple interference effect is one of the major causes of the fluctuation in critical dimension control (CD) and in mark detection for alignment. Suppressing this effect is critical for future photolithography. We propose a new photolithography technique called anti reflective coating on resist (ARCOR), which improves linewidth accuracy and overlay accuracy by suppressing multiple interference. ARCOR consists of relatively simple processes: A clear antireflective film is spun onto the resist prior to the mark detecting for alignment and exposure. The film is subsequently removed and the resist developed in the conventional way. ARCOR differs from ARC, which suppresses the reflection at the resist/substrate interface. ARCOR suppresses the reflection at the air/resist interface. ARCOR allows mark detection and exposure without light intensity-loss and multiple interference. The experiments mainly examine polysiloxane and perfluoroalkylpolyether as ARCOR materials. I t is shown that linewidth accuracy can be improved from 0.3 to 0.03 km. The signal-to-noise ratio of the alignment signal is drastically improved, and the overlay error is about half that of the conventional method. ARCOR is also effective for directly measuring the reflectivity at the resist/sub strate interface, which is a key parameter of the multiple interference effect and the halation. Using ARCOR and a thin resist film, the measured ratio of reflected light to incident light indicates the reflectivity at the resist/substrate interface. Because, the probe light does not reflect off the resist surface and the intensity-loss at the resist surface is suppressed. With perfluoroalkylpolyether film, the measurement error isl .5%.

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Section: Simulated Results and Discussionmentioning

confidence: 99%