2020
DOI: 10.25206/1813-8225-2020-170-58-62
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New materials and sensors for semiconductor gas analysis

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“…Sensors based on typical semiconductors (including binary type A 3 B 5 , A 2 B 6 ) are capable of detecting a large number of different substances at low temperatures, up to room temperature, which makes them quite promising. The operation of semiconductor sensors is based mainly on the relationship of the electrical conductivity of the near-surface layer of the spatial charge of the semiconductor with the charging of its surface due to the adsorption of foreign atoms [13].…”
Section: Introductionmentioning
confidence: 99%
“…Sensors based on typical semiconductors (including binary type A 3 B 5 , A 2 B 6 ) are capable of detecting a large number of different substances at low temperatures, up to room temperature, which makes them quite promising. The operation of semiconductor sensors is based mainly on the relationship of the electrical conductivity of the near-surface layer of the spatial charge of the semiconductor with the charging of its surface due to the adsorption of foreign atoms [13].…”
Section: Introductionmentioning
confidence: 99%