Newton interferometer with phase-shifting and phase-scanning measurement modes

Trịnh, Hưng-Xuân; Lin, Shyh-Tsong; Chen, Liang-Chia; Yeh, Sheng-Lih; Hoang, Hong-Hai

doi:10.1016/j.sna.2015.09.001

Sensors and Actuators A: Physical

2015

DOI: 10.1016/j.sna.2015.09.001

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Newton interferometer with phase-shifting and phase-scanning measurement modes

Hưng-Xuân Trịnh

Shyh-Tsong Lin

Liang-Chia Chen

et al.

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Newton interferometer with phase-shifting and phase-scanning measurement modes

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References 13 publications

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