Nitrogen doped high selectivity amorphous carbon film for high aspect ratio etch process

Park, Se Jun; Kim, Dohyung; Baek, Song Yi; Lee, Changsoo; Kim, Jaehyun; Roh, Sangho; Park, Jaesung; Kyung, Sejin; Choi, Chulhwan

doi:10.1016/j.tsf.2024.140582

Thin Solid Films

2025

DOI: 10.1016/j.tsf.2024.140582

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Nitrogen doped high selectivity amorphous carbon film for high aspect ratio etch process

Se Jun Park,

Dohyung Kim,

Song Yi Baek

et al.

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Nitrogen doped high selectivity amorphous carbon film for high aspect ratio etch process

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References 30 publications

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