2001
DOI: 10.1016/s0257-8972(01)01213-0
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Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: film microstructure and tribological properties

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Cited by 16 publications
(7 citation statements)
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“…The characteristic wavelengths in figure 6(b) are representative of bonds reported for boron oxide; a wide peak centered at about 3350 cm −1 for stretching of O-H bonds and a sharp asymmetric peak at about 1196 cm −1 representative of B-O deformation. Boron carbide was eliminated as the prominent secondary phase since the broad shoulder around 1050 cm −1 characteristic of boron carbide phonons is not present [41,42]. Another condition that is not met for the formation of prevalent boron carbide impurities during the CVD procedure is a high growth temperature (>1000°C) [43,44].…”
Section: Resultsmentioning
confidence: 99%
“…The characteristic wavelengths in figure 6(b) are representative of bonds reported for boron oxide; a wide peak centered at about 3350 cm −1 for stretching of O-H bonds and a sharp asymmetric peak at about 1196 cm −1 representative of B-O deformation. Boron carbide was eliminated as the prominent secondary phase since the broad shoulder around 1050 cm −1 characteristic of boron carbide phonons is not present [41,42]. Another condition that is not met for the formation of prevalent boron carbide impurities during the CVD procedure is a high growth temperature (>1000°C) [43,44].…”
Section: Resultsmentioning
confidence: 99%
“…In C 3 N 4 , the first set of N-atoms are bonded to 3-coordinated C atoms (sp 2 configuration), and then C atoms are bonded with a 2-coordinated second set of N atoms in the triazine ring (sp 2 hybridization). In this B–C–N triangle exist the hardest materials known – diamond, followed by cubic BN (c-BN) and B 4 C. 26 The atomic similarity of B, C and N elements leads to the formation of BCN ternary compounds within the triangle. 27 c-BCN exhibits super hardness by combining the properties of diamond and c-BN.…”
Section: B–c–n Materialsmentioning
confidence: 99%
“…Thin films were synthesized by pulsed DC magnetron sputtering from BN + C (Martinez et al, 2002) or B 4 C (Johansson et al, 1996;Freire et al, 2001;Reigada et al, 2001;Chen et al, 2006) or B 4 C + C (Xu et al, 2006a(Xu et al, , 2006b) targets in Ar/N 2 atmosphere. Effects of target power, target pulse frequency, substrate bias and pulse frequency on surface roughness were studied.…”
Section: Reactive DC Magnetron Sputteringmentioning
confidence: 99%