2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference (CLEO EUROPE/EQEC) 2011
DOI: 10.1109/cleoe.2011.5942520
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Non-contact multilayer thickness measurements with reflection-mode terahertz time-domain spectroscopy

Volker K. S. Feige1,
S. Nix2,
Frank Ellrich
3
et al.

Abstract: Terahertz waves penetrate nonconductive coatings and are reflected at the boundary layers between different refraction indices. This creates new potential for quality control when added to established nondestructive testing techniques such as ultrasonic or x-ray

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