Non-Destructive Observations of Internal Microstructures of Materials by Scanning Electron-Induced Acoustic Microscopy

Shibutani, Yoji; Koyama, Atsuhiro; Shiota, Takeshi

doi:10.2472/jsms.55.95

“…The radiographic inspection equipment, in fact, is the non-destructive way, while it has lower resolution compared with TEM or SEM. Then, we have developed the scanning electron-induced acoustic microscope (SEAM) (Shibutani et al, 2006;Koyama and Shibutani, 2012). SEAM has been originally proposed by Cargill (Cargill, 1980), Brandis & Rosencwaig (Brandis and Rosencwaig, 1980) and Rosencwaig (Rosencwaig, 1982) as one of the methods of non-destructive detection of internal micro-defects and structures.…”

Section: Introductionmentioning

confidence: 99%

Non-destructive observations of small crack using scanning laser-induced acoustic microscope

Koyama

¹

,

Takase

²

,

Motomura

³

et al. 2016

Mechanical Engineering Journal

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The scanning laser-induced acoustic microscope (SLAM) has been developed as a tool for non-destructive observations of the defects in materials. It consists of the laser with modulation system, the function generator, the lock-in amplifier, the AE sensor which detects the longitudinal acoustic waves, the XY stage and a computer for signal processing. The cyclic chopping laser beam causes the thermal wave. Our own-built SLAM has successfully provided some nondestructive observations; the bonding boundary of the different materials and the small crack in the materials. Since the SLAM senses the local difference of thermal properties in the sample, it performs observing the boundary or the crack well. The scanning laser-induced acoustic image (LAI) is affected by the power and chopping frequency of the laser. We revealed that the laser power more than a certain value (105 mW) is required in order to obtain a clear LAI with our SLAM in the case of the observation of aluminum alloy. Moreover, the LAI is affected by the chopping frequency of the laser and the LAI becomes clearer as the chopping frequency becomes higher even if the chopping frequency is up to 15 kHz which is relatively low.

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“…The radiographic inspection equipment is, in fact, the non-destructive way, meanwhile it has lower resolution compared with TEM or scanning Proceedings of ATEM'11 2 ATEM'11, September 19-21, 2011, Kobe, Japan electron microscope (SEM). These drawbacks and advantages motivate us to develop the scanning electron-induced acoustic microscope (SEAM) (1) . SEAM has originally been proposed by Cargill (2) and Brandis & Rosencwaig (3) independently as one of the prospective candidates of non-destructive detection of micro-defects.…”

Section: Introductionmentioning

confidence: 99%

OS02F037 Non-destructive Observations of Internal Micro-defects using Scanning Electron-induced Acoustic Microscope

Koyama

¹

,

Shibutani

²

2011

ATEM

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Scanning electron-induced acoustic microscope (SEAM) has been developed as a new tool for non-destructive observations of the internal microstructures of materials. It consists of the electric chopper to pulse the high current electron beam and the detector of the longitudinal acoustic waves, both being attached to the commercial scanning electron microscope (SEM). The cyclic chopping of electron beam with extremely high frequency of a few hundred kilohertz makes the thermal wave due to the cyclic temperature rise with the short period. The wavelength of thermal wave may determine the essential SEAM resolution, because it's much smaller than the thermal stress wave (that is, the acoustic wave), which has just the role of conveying the information of thermal wave disturbance due to unexpected change as defects. Our own-built SEAM gives the best performance for observing the internal defects like the micro-voids, because it susceptibly senses the local difference of thermal properties in the sample. The paper indicates that some non-destructive observations for the micro-voids with a few microns order existing in the sintered materials are exhibited in conjunction with their destructive observations using focused-ion beam (FIB) technique to make certain of those as the proof.

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“…SEAM has successfully been applied to the non-destructive observation of delamination of integrated circuit (4) , interface of multi-layered film (5) , phase transition od ceramics (6) , internal fracture of hard-coated material (7) and so on. And our own-built SEAM has provided martensitic phase transformation and grain boundary without any chemical etching (1) besides.…”

Section: Introductionmentioning

confidence: 99%

“…The radiographic inspection equipment is, in fact, the non-destructive way, meanwhile it has lower resolution compared with TEM or scanning electron microscope (SEM). These drawbacks and advantages motivate us to develop the scanning electron-induced acoustic microscope (SEAM) (1) . SEAM has originally been proposed by Cargill (2) and Brandis & Rosencwaig (3) independently as one of the prospective candidates of non-destructive detection of micro-defects.…”

Section: Introductionmentioning

confidence: 99%

Non-Destructive Observations of Internal Micro-Defects Using Scanning Electron-Induced Acoustic Microscope

Koyama

¹

,

Shibutani

²

2012

JMMP

Self Cite

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Scanning electron-induced acoustic microscope (SEAM) has been developed as a new tool for non-destructive observations of the internal microstructures of materials. It consists of the electric chopper to pulse the high current electron beam and the detector of the longitudinal acoustic waves, both being attached to the commercial scanning electron microscope (SEM). The cyclic chopping of electron beam with extremely high frequency of a few hundred kilohertz makes the thermal wave due to the cyclic temperature rise with the short period. The wavelength of thermal wave may determine the essential SEAM resolution, because it's much smaller than the thermal stress wave (that is, the acoustic wave), which has just the role of conveying the information of thermal wave disturbance due to unexpected change as defects. Our own-built SEAM gives the best performance for observing the internal defects like the micro-voids, because it susceptibly senses the local difference of thermal properties in the sample. The paper indicates that some non-destructive observations for the micro-voids with a few microns order existing in the sintered materials are exhibited in conjunction with their destructive observations using focused-ion beam (FIB) technique to make certain of those as the proof.

show abstract

Non-Destructive Observations of Internal Microstructures of Materials by Scanning Electron-Induced Acoustic Microscopy

Cited by 4 publications

References 9 publications

Non-destructive observations of small crack using scanning laser-induced acoustic microscope

Non-destructive observations of small crack using scanning laser-induced acoustic microscope

OS02F037 Non-destructive Observations of Internal Micro-defects using Scanning Electron-induced Acoustic Microscope

Non-Destructive Observations of Internal Micro-Defects Using Scanning Electron-Induced Acoustic Microscope

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