2021
DOI: 10.35848/1347-4065/abee04
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Nonequilibrium characteristics in the rotational temperature of CO excited states in microwave discharge CO2 plasma

Abstract: Optical emission spectroscopy (OES) measurements are performed on the third positive system (3PS) and Ångstrom system bands for microwave discharge CO2 plasma with its discharge pressure of 1 Torr. The molecular vibrational temperature T v and rotational temperature T r of CO b 3Σ+ and CO B 1Σ+ states, which are the CO electronically excited upper states of the 3PS band and of the Ångstrom band, respectively, are determined as the best fitting parameters in the theoretical c… Show more

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Cited by 2 publications
(3 citation statements)
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“…OES was performed to estimate the excited species generated by electron impact. [22][23][24][25][26][27][28][29][30][31][32] The light from the whole plasma area is focused using a lens. The lens is placed on the upper side of the reactor, and the focused light was guided to the spectrometer with an optical fiber.…”
Section: Experimental Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…OES was performed to estimate the excited species generated by electron impact. [22][23][24][25][26][27][28][29][30][31][32] The light from the whole plasma area is focused using a lens. The lens is placed on the upper side of the reactor, and the focused light was guided to the spectrometer with an optical fiber.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…In addition, OES is a useful method for estimating the vibrational temperature. 25,[30][31][32] The vibrational excitation state is often represented by a parameter referred to as the vibrational temperature, which is calculated based on the assumption that the distribution of the vibration excitation state follows the Boltzmann distribution. Plasma-based CO 2 recycling and decomposition technologies are attracting more attention, and more studies aim to elucidate the behavior of vibrationally excited species by OES.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…OES is an effective method for diagnosing the plasma state. [28][29][30][31] Figure 7 shows the gas flow rate dependence of the Hα and Hβ/Hα emission intensities at a discharge volume of 30.1 cm 3 . Hα is affected by the electron temperature and density, whereas Hβ/Hα is only affected by the electron temperature.…”
mentioning
confidence: 99%