2024
DOI: 10.1002/adem.202401157
|View full text |Cite
|
Sign up to set email alerts
|

Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides

Lorenzo Ramò,
Ermes Peci,
Michele Magnozzi
et al.

Abstract: The coupling of nanostructures with emerging 2D semiconductors is gaining significant interest thanks to the unique features of these hybrids systems, which make them key platforms for next‐generation applications in electronics, optoelectronics, and sensing. Top‐down lithographic approaches uniquely enable the fully deterministic high‐resolution fabrication of nanostructures, but some of them, like electron‐beam lithography and focused ion‐beam lithography, employ energetic particles that may damage 2D materi… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 95 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?