Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing

Musselman, Marcus; Xie, Hongwen; Djurdjanović, Dragan

doi:10.1007/s10845-017-1308-4

J Intell Manuf

2017

DOI: 10.1007/s10845-017-1308-4

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Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing

Marcus Musselman

Hongwen Xie

Dragan Djurdjanović

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Cited by 3 publications

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Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing

Cited by 3 publications

References 27 publications

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