Novel, 100V, Trench Super Junction high voltage TFTs using low temperature poly crystalline silicon

Dhyani, Mahesh H.; Green, D.W.; Sweet, M.; Narayanan, E.M. Sankara; Deane, S. C.; Young, N. D.

doi:10.1109/iedm.2009.5424386

2009 IEEE International Electron Devices Meeting (IEDM) 2009

DOI: 10.1109/iedm.2009.5424386

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Novel, 100V, Trench Super Junction high voltage TFTs using low temperature poly crystalline silicon

Mahesh H. Dhyani

D.W. Green

M. Sweet

et al.

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2016

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“…Several semiconductor materials have been tried out to make HVTFT devices. Amorphous Si and poly-Si HVTFTs have been studied since the 1980s 8 9 10 11 12 . Martin et al .…”

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confidence: 99%

MgZnO High Voltage Thin Film Transistors on Glass for Inverters in Building Integrated Photovoltaics

Hong

et al. 2016

Sci Rep

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Building integrated photovoltaics (BIPV) have attracted considerable interests because of its aesthetically attractive appearance and overall low cost. In BIPV, system integration on a glass substrate like windows is essential to cover a large area of a building with low cost. However, the conventional high voltage devices in inverters have to be built on the specially selected single crystal substrates, limiting its application for large area electronic systems, such as the BIPV. We demonstrate a Magnesium Zinc Oxide (MZO) based high voltage thin film transistor (HVTFT) built on a transparent glass substrate. The devices are designed with unique ring-type structures and use modulated Mg doping in the channel - gate dielectric interface, resulting in a blocking voltage of over 600 V. In addition to BIPV, the MZO HVTFT based inverter technology also creates new opportunities for emerging self-powered smart glass.

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“…Several semiconductor materials have been tried out to make HVTFT devices. Amorphous Si and poly-Si HVTFTs have been studied since the 1980s 8 9 10 11 12 . Martin et al .…”

mentioning

confidence: 99%

MgZnO High Voltage Thin Film Transistors on Glass for Inverters in Building Integrated Photovoltaics

Hong

et al. 2016

Sci Rep

View full text Add to dashboard Cite

show abstract

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Novel, 100V, Trench Super Junction high voltage TFTs using low temperature poly crystalline silicon

Cited by 1 publication

References 4 publications

MgZnO High Voltage Thin Film Transistors on Glass for Inverters in Building Integrated Photovoltaics

MgZnO High Voltage Thin Film Transistors on Glass for Inverters in Building Integrated Photovoltaics

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