“…Moreover, piezoelectric layer allows to control parameters of microresonators, which could assure higher functionality and accuracy of micromechanical systems. Lead oxide based ferroelectrics, represented by lead zirconate titanate (Pb(Zr,TI)O3) or PZT [3,4], polyvinylidene fluoride (PVDF) films [5,6] and zinc oxide (ZnO) films [7,8] are the three main materials used in most piezoelectric applications due to their high piezoelectric coefficients, very good flexibility and strong electromechanical coupling [9].…”