Novel magnetic microstigmator for electron beam astigmatism correction in the electron beam microcolumn system

Abstract

Electron optical image correction subsystem in electron beam projection lithographyA novel magnetic microstigmator was developed for the astigmatism correction in the electron beam microcolumn system. The magnetic microstigmator consists of eight magnetic poles coupled with micromachined solenoid-type coils that are divided into four pairs. The proposed magnetic microstigmator was fabricated using microelectromechamical system technology and was assembled in an electron beam microcolumn for testing. The preliminary experimental results show that the developed magnetic microstigmator can effectively correct the astigmatism of the electron beam in the electron beam microcolumn with a driving current of 300 mA and low power. Rong et al.: Novel magnetic microstigmator for electron beam microcolumn system 2022