Novel method for the production of SiC micro and nanopatterns

Abstract

HIGHLIGHTS A novel method was demonstrated for the production of SiC micro and nanopatterns  Patterning and SiC compound formation happened in one step at room temperature  The SiC formation was proved by AES depth profiling  Two different patterns were presented  The method can be considered as a possibility to fabricate SERS substrates

Corrosion Resistance of Tungsten-Carbide-Rich Coating Layers Produced by Noble Gas Ion Mixing

“…Harbsmeier et al have shown that ion bombardment can induce solid state reaction in Si&C mixture [17]. Racz et al showed that SiC nano-layer can be produced by IBM at room temperature [18,19].…”