Novel Star Polymers as Chemically Amplified Positive-Tone Photoresists for KrF Lithography Applications

Abstract

Xanthate-mediated reversible addition–fragmentation chain transfer (RAFT) methodologies have been applicable to preparation of branched or star polymers. In this article, novel star copolymers have been synthesized through xanthate-mediated RAFT polymerization with p-acetoxystyrene and tert-butyl acrylate. Fourier transfer infrared, nuclear magnetic resonance spectra, and gas chromatography analyses indicated that the polymerization was successful between both of the monomers and the star RAFT agent. The intrinsic viscosity and Zimm branching factor (g′) were used to confirm the copolymers’ architecture. The ultraviolet absorbance of the copolymer solutions indicated that the copolymer was suitable for use as a krypton fluoride (KrF) laser photoresist. Moreover, the photolithography performance of the positive-tone chemically amplified photoresist was evaluated. The results indicated that the photosensitive based on the star copolymer was higher than the linear one, and the pattern resolution was around 200 nm at a low exposure energy.

Highly photosensitive furan acrylate derivatives and their solid-state photopolymerization

“…Taking printed electronics as an example, with the increasingly subtle and highdensity requirements for printing circuit graphics, highly photosensitive materials can improve the printing resolution and production efficiency. 5 Polymerization is normally carried out in the liquid state, which provides the monomer and initiator molecules with good mobility and ensures a high functional group conversion rate. However, studies have demonstrated that some crystalline monomers can be polymerized in the solid state and a high conversion rate is achieved.…”

“…Taking printed electronics as an example, with the increasingly subtle and high-density requirements for printing circuit graphics, highly photosensitive materials can improve the printing resolution and production efficiency. 5…”