NTT superconducting storage ring—Super-ALIS

Abstract

A terraced scanning super conducting quantum interference device susceptometer with submicron pickup loops A superconducting electron storage ring fully dedicated to x-ray lithography has been deveiope<L It has a racetrack shape, consisting of two superconducting bending magnets, other normal conducting multipole magnets, rf system, vacuum system, and beam monitoring systems. The storage ring circumference is 16.8 m. The critical wavelength (.(.) is 17.3 A.. The beam size (0') at every synchrotron radiation source point is less than 1 mm. This machine employs the energyboost-in-the-ring scheme; electrons are injected at around 15 MeV and then accelerated to 600 Me V in the ring. The injector is a newly developed linear accelerator with an energy compression system. Higher-energy injection is also available.

Fabrication of x-ray mask from a diamond membrane and its evaluation

“…The transferred patterns were observed using a field-emission scanning electron microscope ͑FE-SEM͒ with a maximum resolution of 1.5 nm. All processes using SR x rays were carried out in the SR lithography facility at the NTT System Electronics Laboratories, where the 600 MeV superconducting compact storage ring Super-ALIS, efficient beamlines, 16 vertical steppers SS-1 with an optical heterodyne alignment system, 17 and resist processing equipment are available. The exposure was carried out in air with a 30 m proximity gap.…”

Electron storage rings as X‐ray lithography sources: An update

“…NTT's SUPER ALIS (17,18) ring was designed and constructed in collaboration with Hitachi Corporation. A unique feature of this machine is that it has two injection septum magnets to accommodate very low energy injection (15 MeV) directly from a linac or full energy injection (600 MeV) from their conventional magnet booster/storage ring.…”

Review of vacuum systems for X-ray lithography light sources

“…SUPER-ALIS is a racetrack designed superconducting storage ring with a warm chamber 13 . NEG strip pumps are installed on the inner side of the dipole chamber.…”

“…u describes the NEG performance under synchrotron radiation. High purity silicon beam absorbers were installed to reduce the photodesorption yield 13 .…”