Nucleation Control of Diamonds by Reducing Flame with High-Voltage Pulse and Synthesis of Smoothed Surface Diamond Film.

幸彦, 奥村; 健, 岡崎

doi:10.1299/kikaib.67.2333

Cited by 2 publications

(1 citation statement)

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“…The combustion flame method allows diamond syntheses to be carried out under atmospheric pressure conditions (7) , achieving a film growth rate that is ten times faster than that yielded by low-pressure CVD; this enables the experimental equipment to be simplified and rendered inexpensive without the need of a reaction vessel (7)- (10) . Owing to these features, many researches have been carried out by the combustion flame method thus far (11)- (16) . However, the evaluation of diamond films, which have been used as object materials in combustion flame syntheses, has not been thoroughly performed.…”

Section: Introductionmentioning

confidence: 99%

Effect of Synthesis Condition on Electrical Characteristic of Diamond Film Produced by C2H2/O2 Combustion Flame

Okumura

Kanayama

Teraki

2009

JTST

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In this study, we attempted to clarify the electrical characteristics of diamond films synthesized by combustion flame and consequently synthesizing a suitable diamond film for use in electronic device applications. When the film contains amorphous carbon, the electrical resistivity (volume resistivity) decreases, i.e., the electrical characteristics of the diamond film worsen. To decrease the content of amorphous carbon in the diamond film, we utilized methods to detect two parameters: optimal equivalent ratio and optimal substrate temperature. These methods can decrease the amount of amorphous carbon effectively, thereby systematically changing the factors influencing the optimal synthesis for improving the film's electrical characteristics. We have successfully developed a method for producing high-quality diamond films with excellent electrical characteristics and high electrical resistivity (10 10 to 10 13 Ωm) at room temperature.

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Section: Introductionmentioning

confidence: 99%