Numerical Analysis and Experiment of Environmental Control Cell for Ultra-nano Precision Machine

Abstract

Article history:In ultra-precision machining, the inside temperature should be controlled precisely. The important factors are environmental conditions (outside temperature, humidity) and temperature conditions (cutting heat, spindle heat). Thus, in this study, an environmental control cell for the ultra-precision machine that could control the inside temperature and minimize effects of the surrounding environment to achieve a thermal deformation of less than 400nm of a specimen was designed and verified through C.F.D. Further, a method that could control the temperature precisely by using a blower, heat exchanger and heater was evaluated. As a result, this study established a C.F.D technic for the environmental control cell, and the specimen temperature was controlled to be within 17.465 ± 0.055℃.