2024
DOI: 10.3952/physics.2024.64.1.5
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Numerical simulation of proton backscattering spectra in GEANT4 toolkit

Danielius Lingis,
Mindaugas Gaspariūnas,
Vitalij Kovalevskij
et al.

Abstract: Rutherford backscattering spectroscopy (RBS) is a widely used technique for the atomic-scale analysis of sample composition, lattice displacement and impurity profiling. RBS is based on the elastic scattering of incident charged particles by target nuclei and the subsequent detection of scattered particles. The interpretation of RBS spectra, however, poses challenges due to overlapping peaks, corresponding to scattering from different atomic species, and uncertainties from energy loss, sca… Show more

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