J. Surf. Investig.
 2023
DOI: 10.1134/s1027451023060289
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Numerical Simulation of Thermal Processes and the Effect of Heating of Near-Surface Layers of Titanium on the Diffusion Transfer of Dopants during High-Intensity Pulsed Ion Implantation

A. I. Ivanova,
G. A. Bleykher
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