Numerical studies on up scaling of metal organic PACVD processes used for tribological coating in automotive industry

Numerical studies on PACVD processes used for TiN multifunctional films using metal organic precursors

“…The plasma is ignited between the powered substrate holder and the earthed reactor wall using a bipolar DC pulse power supply. The substrates are heated by plasma and an auxiliary heater that is positioned inside the reaction chamber [6].…”

“…The gas mixture is considered as a continuous medium and an ideal fluid displaying Newtonian behavior, which seems to be a reasonable assumption for the moderate-pressure range, investigated in the present study. Further details solving equations of continuity, momentum and energy equations as well as the mass/heat transfer for the gas species have been reported previously [6].…”

“…In this study, TDMAT is fed into the chamber simultaneously with the operating gases N 2 , H 2 and Ar. The process parameters investigated in this study are adopted from the previous study [6].…”

“…1. The process gases are fed into the chamber by a tubular shower system arranged on the central axis of the chamber [6]. A three-dimensional half-cylinder frame mesh system is adopted for a physical PACVD pilot chamber model of 42, 42 and 80 grid points in the r, y and z directions, respectively.…”

A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition

“…In the research of Son et al [50], a new simulation of the PACVD coating process for low-temperature deposition of TiN layers was done. They used Tetrakis (dimethylamino) titanium in a pilot plant as an intermediate step in order to apply results for different size of chambers.…”