2020
DOI: 10.1088/1361-6463/ab6ccb
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Numerical thermofluid simulation on tandem type of induction thermal plasmas with and without current modulation in a lower coil

Abstract: This paper describes numerical calculations on tandem-type induction thermal plasmas with and without current modulation of the lower coil. The tandem type of induction thermal plasma (tandem-ITP) has been developed with two independent rf coils in one plasma torch for stable operation and spatial control of temperature field in ITP. Furthermore, the coil current modulation for tandem-ITP, i.e. tandem type of pulse-modulated induction thermal plasma (tandem-PMITP), is expected to offer a temporo-spatially vary… Show more

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Cited by 9 publications
(5 citation statements)
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“…Furthermore, we developed two-coil tandem type MITP for NPs [25,26,28,42]. Tandem MITP consists of twoindependent coils surrounding one plasma torch.…”
Section: Principle and Procedures Of Tandem Mitp + Tcff Methodsmentioning
confidence: 99%
See 2 more Smart Citations
“…Furthermore, we developed two-coil tandem type MITP for NPs [25,26,28,42]. Tandem MITP consists of twoindependent coils surrounding one plasma torch.…”
Section: Principle and Procedures Of Tandem Mitp + Tcff Methodsmentioning
confidence: 99%
“…The frequencies of the upper-coil current and lower-coil current were set respectively to 430 and 300 kHz. These frequencies of the upper-coil and the lowercoil currents were determined experimentally and theoretically to reduce mutual inductive coupling between the two coils [25,26,28,42]. Both coil currents were modulated into rectangular waveforms with the time-averaged power of 10 kW under modulation condition.…”
Section: Calculation Conditionsmentioning
confidence: 99%
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“…The tandem-MITP can be realized using two RF power sources with different frequencies at reasonable prices. Figure 16 depicts a schematic diagram of the tandem type of modulated induction thermal plasma (Tandem-MITP) system [66,67]. The tandem-MITP is sustained by two RF power supplies: an RF power supply for the upper coil and an RF power supply for the lower coil.…”
Section: Tandem-type Modulated Induction Thermal Plasmamentioning
confidence: 99%
“…Because of rapid cooling in thermal plasma, MITP is useful for diamond particle nucleation in the first stage of diamond film deposition. The fourth topic is a new tandem MITP with two coils, which has been established [66,67]. In this case, two coil currents are modulated for temporal and spatial control of the thermal plasma.…”
Section: Introductionmentioning
confidence: 99%