Articles you may be interested inElectrode effects on the conduction mechanisms in HfO 2 -based metal-insulator-metal capacitors Effect of metal contacts on the electrical characteristics of Al 2 O 3 dielectric thin films Appl. Phys. Lett. 92, 122911 (2008); 10.1063/1.2903708Low temperature crystallization of high permittivity Ta oxide using an Nb oxide thin film for metal/insulator/metal capacitors in dynamic random access memory applicationsThe temperature dependence of capacitance, C M , and conductance, G M , of Al-Al 2 O 3 -metal capacitors with Cu, Ag, and Au electrodes has been measured between 100 and 340 K at seven frequencies between 10 kHz and 1 MHz. Al 2 O 3 films between 15 and 64 nm thick were formed by anodizing evaporated Al films in borate-glycol or borate-H 2 O electrolyte. The interface capacitance at the Al 2 O 3 -metal interface, C I , which is in series with the capacitance C D due to the Al 2 O 3 dielectric, is determined from plots of 1/C M versus insulator thickness. C I is not fixed for a given metal-insulator interface but depends on the vacuum system used to deposit the metal electrode. C I is nearly temperature independent. When C I is taken into account the dielectric constant of Al 2 O 3 determined from capacitance measurements is ϳ8.3 at 295 K. The dielectric constant does not depend on anodizing electrolyte, insulator thickness, metal electrode, deposition conditions for the metal electrode or measurement frequency. By contrast, G M of Al-Al 2 O 3 -metal capacitors depends on both the deposition conditions of the metal and on the metal. For Al-Al 2 O 3 -Cu capacitors, G M is larger for capacitors with large values of 1/C I that result when Cu is evaporated in an oil-pumped vacuum system. For Al-Al 2 O 3 -Ag capacitors, G M does not depend on the Ag deposition conditions.