“…Off-stoichiometry components can be incorporated into the structure of growing RBa 2 Cu 3 O 7 - δ films as structural defects, provided the kinetics of the phase formation is slow in comparison with the deposition rate . For example, the formation of cubic perovskite (Y,Ba)CuO 3 - x with a significant cation disorder in the Y and Ba crystallographic positions and/or Y for Ba substitution was observed by XRD, if the film growth was carried out at reduced deposition temperatures. − Too high deposition temperatures and/or too low deposition p (O 2 ) values may also be the reason for R/Ba cation disorder as well as related crystallographic vacancies, mainly in the apical oxygen site. , In this case, p (O 2 )− T deposition conditions approach the instability border of RBa 2 Cu 3 O 7 - δ , or even lie outside the area of thermodynamic stability. , Apart from point defects and substitution, off-stoichiometry cations may also be incorporated into the film structure due to the formation of extended defects, such as Y 2 Ba 4 Cu 7 O 15 - δ or YBa 2 Cu 4 O 8 structural fragments, anti-phase boundaries, and stacking faults. − The optimal p (O 2 )− T growth conditions, with respect to the films' structural quality and superconducting properties, have often been reported to be located near the equilibrium line between CuO and Cu 2 O oxides. , …”