On the performance of PVDF based piezoelectric sensor with microstructures

Abstract

This paper aims to investigate the performance of piezoelectric sensors with different shapes of 3D-printed microstructures. Based on the numerical analysis in the time-frequency domain, the microstructures are printed directly on the PVDF transparent film exhibiting higher piezoelectric coefficients using a high-resolution two-photon polymerization method. Bi-directional gold IDTs are fabricated by sputtering gold onto the substrate surface using a 3D-printed stencil. The mechanical properties of the film and surface morphology of printed microstructures are examined using a nanoindenter and a 3D profilometer. The change in frequency response due to the microstructure is measured using a network analyzer. This study will be a reference for developing an efficient wave-based gas sensor with enhanced sensitivity.