Asia Communications and Photonics Conference 2012
DOI: 10.1364/acpc.2012.ath2f.3
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Optical Absorption Enhancement in Slanted Micro-Hole C-Si for Photovoltaic Applications

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“…Nanoholes, which are cylindrical negative nanostructures that have a pore-like nature, have shown through simulations that they provide superior geometrical confinement of incident photons and enhance electron-photon coupling into the underlying substrate material compared to free-standing positive nanostructures. [36][37][38] However, the realization of (Al)GaN nanohole arrays with precise control over the holes' size, distribution, and vertical profile is yet technically challenging, leading to limited studies and development efforts of the (Al)GaN nanoholes. [39][40][41] This study shows the fabrication and performance analysis of MSM UV PDs with and without periodic nanohole array patterns on AlGaN/GaN HEMT structure grown with a double GaN/AlN superlattice (SL) buffer stack.…”
Section: Introductionmentioning
confidence: 99%
“…Nanoholes, which are cylindrical negative nanostructures that have a pore-like nature, have shown through simulations that they provide superior geometrical confinement of incident photons and enhance electron-photon coupling into the underlying substrate material compared to free-standing positive nanostructures. [36][37][38] However, the realization of (Al)GaN nanohole arrays with precise control over the holes' size, distribution, and vertical profile is yet technically challenging, leading to limited studies and development efforts of the (Al)GaN nanoholes. [39][40][41] This study shows the fabrication and performance analysis of MSM UV PDs with and without periodic nanohole array patterns on AlGaN/GaN HEMT structure grown with a double GaN/AlN superlattice (SL) buffer stack.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, there are many studies about the optical properties of various of nanostructures, such as nanowire (Garnett and Yang 2008, Garnett and Yang 2010, Cao et al 2010, Wu et al 2017, Xu et al 2017, Wang et al, 2017a, nanocone (Xu et al 2016), nano-hemisphere (Kang and Fang 2014), truncated nanocone (Kim et al 2018), pyramid (Tan et al 2017), motheye (Makableh et al 2018), nanohole (Han and Chen 2010, Peng et al 2010, Adib et al 2012, Chen et al 2014, Hong et al 2014, Wang et al 2017a, 2017b, Deng et al 2018, Fu et al 2018, and nano-conehole (Du et al 2011). The main materials of those nanostructures are silicon, silicon nitride, silicon carbide, gallium arsenide, or gallium nitride.…”
Section: Introductionmentioning
confidence: 99%