Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning
Przemysław Struk,
Sylwester Bargiel,
Michal Józwik
et al.
Abstract:This report presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau micro-interferometer fabricated in MOEMS (Micro-Opto-Electro-Mechanical Systems) technology; and a 2-axis electrothermal actuator fabricated in MEMS (Micro-Electro-Mechanical Systems) technology, connected with a GRIN lens collimator and single mode fiber. Herein we present a numerical analysis a… Show more
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