This paper presents both the theoretical foundation and experimental realization of the refracted near-field (RNF) technique for the direct measurement of optical planar and channel waveguide profiles. The experimental setup is discussed in detail. It includes special modifications compared with the customary RNF apparatus used for optical fiber profiling. Nevertheless, all advantages of the RNF method, as high resolution and accuracy, minimal sample preparation and no computation are conserved. Results are presented to demonstrate the applicability of the technique to multimode planar and channel optical waveguides in glass, obtained by ion-exchange techniques.