Optical Gas Sensing Based on MEMS FTIR Spectrometers

Erfan, Mazen; Sabry, Yasser M.; Ragheb, Marwa Mostafa; Khalil, Diaa A.

doi:10.1117/3.2283087

Cited by 7 publications

(1 citation statement)

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“…Tunable optical filters are microelectromechanical systems (MEMS) which enable construction of miniaturized spectrometers operating in different wavelength ranges of interest [32,33]. An example of such system is a tunable Fabry-Perot interferometer (FPI) that is suited for operation in the near infrared (NIR) spectral range [19,20].…”

Section: Tunable Filter Infrared Sensormentioning

confidence: 99%

A Versatile Capacitive Sensing Platform for the Assessment of the Composition in Gas Mixtures

Sweelssen¹,

Blokland²,

Rajamäki

et al. 2020

Micromachines

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The energy market is facing a major transition, in which natural gas and renewable gasses will play an important role. However, changing gas sources and compositions will force the gas transporters, gas engine manufacturers, and gas grid operators to monitor the gas quality in a more intensive way. This leads to the need for lower cost, smaller, and easy to install gas quality sensors. A new approach is proposed in this study that is based on the chemical interactions of the various gas components and responsive layers applied to an array of capacitive interdigitated electrodes. For Liquid Natural Gas (LNG), containing a relative high concentration of higher hydrocarbons, an array of ten capacitive chips is proposed, that is sufficient to calculate the full composition, and can be used to calculate energy parameters, such as Wobbe Index, Calorific Value, and Methane Number. A first prototype was realized that was small enough to be inserted in low and medium pressure gas pipes and LNG engine fuel lines. Adding the pressure and temperature data to the chip readings enables the determination of the concentrations of the various alkanes, hydrogen, nitrogen, and carbon dioxide, including small fluctuations in water vapor pressure. The sensitivity and selectivity of the new sensor is compared to a compact analyzer employing tunable filter infrared spectrometry.

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Section: Tunable Filter Infrared Sensormentioning

confidence: 99%

A Versatile Capacitive Sensing Platform for the Assessment of the Composition in Gas Mixtures

Sweelssen¹,

Blokland²,

Rajamäki

et al. 2020

Micromachines

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Effect of Inhomogeneous Temperature in Chip‐Scale Infrared Thermal Sources: A Revisited Blackbody Radiation Formula with Experimental Validation

Labib,

Sabry,

Elsayed

et al. 2024

Adv Elect Materials

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Miniature and low‐cost light sources are highly desirable for numerous optical microsystems. Among these, devices based on blackbody radiation of a filament heated at a few hundred degrees, perfectly fit with the requirements of producing a broad spectral range falling in the infrared range, owing to Planck's law. These light sources are of primary interest for Fourier transform infrared (FTIR) spectroscopy. Although thermal light production is simple, achieving precise light intensity is not a trivial task. Herein, the impact of the inhomogeneous temperature on the emitted radiation is studied. Blackbody radiation formulae are revisited for miniature sources, taking into account the temperature distribution and using the principle of superposition of non‐coherent sources. A theoretical model is formulated by dividing the source into multiple annular elementary sources of different temperature. This results in effective, corrected blackbody emission. Analytical formulae are derived in the case of a quadratic temperature distribution. For the experimental validation, a silicon‐based source, made of a platinum resistive micro‐heater on top of heavily doped silicon, is fabricated and experimentally characterized at temperatures ranging from 300 to 520 K. The experimental results show good agreement with the model predictions in the explored wavelength range of (λ = 2.5–4.8 µm).

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Modeling of Fabry-Perot Micro Cavities Under Partial Spatial Coherence Illumination Using Multimode Optical Fibers

Shaheen

Sabry

Khalil

2021

J. Lightwave Technol.

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Optical Gas Sensing Based on MEMS FTIR Spectrometers

Cited by 7 publications

References 0 publications

A Versatile Capacitive Sensing Platform for the Assessment of the Composition in Gas Mixtures

A Versatile Capacitive Sensing Platform for the Assessment of the Composition in Gas Mixtures

Effect of Inhomogeneous Temperature in Chip‐Scale Infrared Thermal Sources: A Revisited Blackbody Radiation Formula with Experimental Validation

Modeling of Fabry-Perot Micro Cavities Under Partial Spatial Coherence Illumination Using Multimode Optical Fibers

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