Optical inspection path planning for large liquid crystal glass substrate detection instrument

Abstract

A large liquid crystal glass substrate detection instrument usually uses the air flotation platform to support a glass substrate. The glass substrate will be deformed by air pressure on the air flotation platform, which will affect the accuracy of detection. In this paper, combined with the characteristics of the detection method of the detection instrument, an optimal detection scanning path with the minimum deflection variation range of the glass substrate is planned so as to minimize the influence of glass substrate deformation on the detection accuracy. In theory, the calculation model of the deflection variation ranges of different paths on the glass substrate is established, the numerical method is used to solve it, and finally, the optimal scanning path for the optical inspection is obtained. The experimental results verify the correctness of the model.