Optical lever calibration in atomic force microscope with a mechanical lever

Xie, Hui; Vitard, Julien; Haliyo, Sinan; Régnier, Stéphane

doi:10.1063/1.2976108

Cited by 14 publications

(10 citation statements)

References 20 publications

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“…However, the access to the optical path is generally unavailable on commercial AFM systems. Therefore, a number of special accessories have been designed for measuring the lateral sensitivity [12][13][14][15]. However, strict requirements for alignment tolerance increase the design complexity and related machining cost.…”

Section: Introductionmentioning

confidence: 99%

A New AFM Nanotribology Method Using a T-Shape Cantilever with an Off-Axis Tip for Friction Coefficient Measurement with Minimized Abbé Error

et al. 2010

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A new AFM (atomic force microscopy) nanotribology method using a T-shape cantilever with an offaxis tip (Nat Nanotechnol 2:507-514, 2007) has been developed for measuring friction coefficient at nanometer scale. In this method, signals due to both bending and twisting of the T-shape AFM cantilever are detected simultaneously. For a T-shape AFM cantilever, the bending is caused by the normal load and the twisting is caused by both the normal and the lateral loads. The twisting generated by the normal load is calibrated in advance. Consequently, the twisting only due to the lateral load can be decoupled from the total lateral voltage signal. And the friction coefficient can be finally determined based on a conversion relationship between the normal and lateral voltage signals of the AFM photodetector. A practical procedure for minimizing Abbé error in friction coefficient measurement has also been introduced. The proposed new method is simple and accurate, and requires the least operation for friction coefficient measurement at nanometer scale.

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Section: Introductionmentioning

confidence: 99%

A New AFM Nanotribology Method Using a T-Shape Cantilever with an Off-Axis Tip for Friction Coefficient Measurement with Minimized Abbé Error

et al. 2010

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“…In addition, to accurately measure angles, the prisms in total internal reflection and the mirrors in multiple light reflections [ 8 , 9 , 10 ] must demonstrate either superior right angles or parallelism; if the parallelism or right angle of a prism is not perfect, it will cause measurement errors [ 7 ]. There are excellent angular and displacement measurement methods [ 11 , 12 , 13 ] but these measurement structures are complicated. To facilitate fabricating components with high precision and to avoid the aforementioned measurement errors, this study proposes a new and simple optical mechanism, which is a hexagonal mirror that can parallel shift the light path and cause variations of light intensity at the detector.…”

Section: Introductionmentioning

confidence: 99%

Using a Hexagonal Mirror for Varying Light Intensity in the Measurement of Small-Angle Variation

Hsieh

Lin

Cheng

2016

Sensors

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Precision positioning and control are critical to industrial-use processing machines. In order to have components fabricated with excellent precision, the measurement of small-angle variations must be as accurate as possible. To achieve this goal, this study provides a new and simple optical mechanism by varying light intensity. A He-Ne laser beam was passed through an attenuator and into a beam splitter. The reflected light was used as an intensity reference for calibrating the measurement. The transmitted light as a test light entered the optical mechanism hexagonal mirror, the optical mechanism of which was created by us, and then it entered the power detector after four consecutive reflections inside the mirror. When the hexagonal mirror was rotated by a small angle, the laser beam was parallel shifted. Once the laser beam was shifted, the hitting area on the detector was changed; it might be partially outside the sensing zone and would cause the variation of detection intensity. This variation of light intensity can be employed to measure small-angle variations. The experimental results demonstrate the feasibility of this method. The resolution and sensitivity are 3 × 10−40 and 4 mW/° in the angular range of 0.6°, respectively, and 9.3 × 10−50 and 13 mW/° in the angular range of 0.25°.

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“…Two individually actuated cantilevers (ATEC-FM) with protruding tips (as per the right inset of figure 1(a)), namely, Tip I and Tip II, are used as end-effectors to build a nanotweezer (as per the left inset of figure 1(a)). Forces on each cantilever are independently detected by its own optical lever, which is typically composed of a laser and a quadrant photodiode [19]. An X-Y -Z piezostage (MCL Nano-Bio2M on X and Y axes, PI P-732.ZC on Z axis) is used for image scanning and Tip II actuation.…”

Section: Introductionmentioning

confidence: 99%

A versatile atomic force microscope for three-dimensional nanomanipulation and nanoassembly

2009

Self Cite

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A conventional atomic force microscope (AFM) has been successfully applied to manipulating nanoparticles (zero-dimensional), nanowires (one-dimensional) or nanotubes (one- or two-dimensional) by widely used pushing or pulling operations on a single surface. However, pick-and-place nanomanipulation in air is still a challenge. In this research, a modified AFM, called a three-dimensional (3D) manipulation force microscope (3DMFM), was developed to realize 3D nanomanipulation in air. This system consists of two individually actuated cantilevers with protruding tips that are facing each other, constructing a nanotweezer for the pick-and-place nanomanipulation. Before manipulation, one of the cantilevers is employed to position nano-objects and locate the tip of the other cantilever by image scanning. During the manipulation, these two cantilevers work collaboratively as a nanotweezer to grasp, transport and place the nano-objects with real-time force sensing. The manipulation capabilities of the nanotweezer were demonstrated by grabbing and manipulating silicon nanowires to build 3D nanowire crosses. 3D nanomanipulation and nanoassembly performed in air could become feasible through this newly developed 3DMFM.

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Optical lever calibration in atomic force microscope with a mechanical lever

Cited by 14 publications

References 20 publications

A New AFM Nanotribology Method Using a T-Shape Cantilever with an Off-Axis Tip for Friction Coefficient Measurement with Minimized Abbé Error

A New AFM Nanotribology Method Using a T-Shape Cantilever with an Off-Axis Tip for Friction Coefficient Measurement with Minimized Abbé Error

Using a Hexagonal Mirror for Varying Light Intensity in the Measurement of Small-Angle Variation

A versatile atomic force microscope for three-dimensional nanomanipulation and nanoassembly

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