“…Some of these chemical methods include chemical vapor deposition (CVD), 16 atmospheric chemical vapor deposition (APCVD), 17 spray pyrolysis, [18][19][20] sol-gel, 21 and spin-coating. 22,23 Ming Li et al [24][25][26][27] reported large scale synthesis of VO 2 (M) nanoparticles by combining hydrothermal synthesis with a subsequent mild thermal treatment. However, ultrasonic nebulized spray pyrolysis of aqueous combustion mixture (UNSPACM) gives a distinct edge over these other techniques because of its simplicity and robustness for depositing high quality thin lms on large area without having to achieve stringent vacuum requirements.…”