Optical Response of Epitaxial ZnO Films Grown by Atomic Layer Deposition and Coimplanted with Dy and Yb

Abstract

In this study, structural and optical properties of ZnO:Dy, ZnO:Yb, and ZnO:(Dy,Yb) films are investigated. Epitaxial ZnO films are grown by atomic layer deposition at 300 °C and implanted with Yb and Dy ions to the fluence of 5 × 1014 cm−2. The effects of Dy and Yb implantation, Dy/Yb coimplantation, and postgrowth annealing are studied by channeling Rutherford backscattering spectrometry (RBS/c) and room‐temperature photoluminescence (RT PL). The damage built up after implantation is found to be similar for Dy and Yb ions, but crystal structure recovery after annealing is more efficient for ZnO:Yb than for ZnO:Dy, when similar annealing conditions are applied. Colorimetric analysis of the RT PL spectra shows that (Dy,Yb) coimplantation allows shifting the optical response of ZnO:Dy films toward white color light. The correlated color temperature can be tuned in this way from 2500 to 3200 K, which makes these films attractive for indoor applications.

Polarized dependence of soft X-ray absorption near edge structure of ZnO films implanted by Yb

“…HR XRD measurements reveal a sharp and well-defined XRD signal from the ZnO films with the full width at half maximum (FWHM) of the 00.2 reflection evaluated as 0.1055 o , while the FWHM of the ZnO -1 to 1.4 reflection evaluated as 0.1491 o . The related reciprocal lattice space maps and details of HR XRD experiment have been shown elsewhere [11]. The next step was to implant the ZnO films with Yb ions at room temperature with 150 keV energy and fluence of 5e14 and 5e15 ions/cm 2 using a Balzers MBP 202RP ion implanter at the Institute of Electronic Materials Technology (ITME), Poland.…”

ZnO – Yb2O3 composite optical ceramics: Synthesis, structure and spectral-luminescent properties

“…Various ZnO materials doped with ytterbium ions were previously developed and studied, i.e., quantum dots [21], nanomaterials [22][23][24][25][26][27][28][29][30][31], films [33][34][35][36][37][38][39][40][41][42][43], microspheres [44] and ion implanted single crystals [45,46].…”

Crystal Lattice Damage and Recovery of Rare-Earth implanted Wide Bandgap Oxides

“…High quality single ZnO crystals produced on a large scale and the production of epitaxial films grown by efficient and cheaper industrial methods are additional advantages of this material. In case of luminescence, β-Ga 2 O 3 emits light in the UV and visible (blue, green) region [9][10][11], while ZnO emits light in the violet-blue region of the spectrum [12].…”