OPTICAL STUDY OF SOL-GEL SPIN-COATING TiO2/Si3N4 MULTILAYERS ON GLASS SUBSTRATES

Abstract

In this work, we have adopted a sol-gel spin-coating technique and prepared alternative TiO2/Si3N4 multilayers on glass substrates. These alternating layers of TiO2/Si3N4 thin film samples were calcinated at two different temperatures and studied for their optical performance. The optical properties of fabricated thin films were investigated by UV-Visible spectrophotometer, X-ray diffractometer (XRD), Fourier transform infrared (FTIR), and Raman spectroscopy. UV-visible spectra showed broader and higher optical reflectance in the visible spectral region. FTIR transmission spectra show Ti-O-Ti and Si-N stretching modes at around 600 and 881 cm-1. XRD pattern confirmed the presence of anatase-TiO2 and α-Si3N4 phases. Finally, Raman spectra revealed the presence of anatase-TiO2 and N-Si vibration modes.