Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation

Seo, Ireh; Jeon, Rakyoung; Yoon, Tae-ung; Lee, Chang-Ha

doi:10.1016/j.psep.2024.08.081

Process Safety and Environmental Protection

2024

DOI: 10.1016/j.psep.2024.08.081

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Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation

Ireh Seo,

Rakyoung Jeon,

Tae-ung Yoon

et al.

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Cited by 2 publications

References 30 publications

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Retailing and pricing decisions in a three-tier fabless semiconductor supply chain with stochastic consumption rate and channel power structures under sustainability measures

Raju,

TM,

Kumar

et al. 2024

International Journal of Systems Science: Operations & Logi

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Retailing and pricing decisions in a three-tier fabless semiconductor supply chain with stochastic consumption rate and channel power structures under sustainability measures

Raju,

TM,

Kumar

et al. 2024

International Journal of Systems Science: Operations & Logi

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Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process

Nguyen,

Lee

2024

Chemosensors

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The semiconductor industry plays a crucial role in various fields but also contributes to environmental degradation. Throughout the semiconductor chip manufacturing process, hazardous gases are released at each stage, despite stringent treatment procedures. These gases can be categorized into four groups: acidic and alkaline gases, volatile organic compounds, flammable and corrosive gases, and greenhouse gases. To meet stricter emission standards, further advancements in gas sensor technology are essential. This review examines recent research on monitoring these gases, highlighting the capabilities and limitations of existing sensor technologies. Additionally, the paper discusses current challenges in gas sensing research and proposes future directions for improving technologies.

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Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation

Cited by 2 publications

References 30 publications

Retailing and pricing decisions in a three-tier fabless semiconductor supply chain with stochastic consumption rate and channel power structures under sustainability measures

Retailing and pricing decisions in a three-tier fabless semiconductor supply chain with stochastic consumption rate and channel power structures under sustainability measures

Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process

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