Abstract:Monolithic three-dimensional (3D) integration enables the most fine-grained integration of transistors by stacking very thin layers and fabricating monolithic inter-layer vias as small as local vias. Thus, monolithic 3D integration is expected to provide a higher degree of wirelength reduction, performance improvement, and power saving. Due to the prospective properties of the monolithic 3D integration technology, research on multilayer monolithic 3D integration that stacks more than two device layers is also … Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.